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Nanomaterials and Nanofabrication Processes for Semiconductor Devices Garner Greatest Number of Nanotechnology Patents

One hundred and two new nanotechnology patents were granted in the first week of 2010, the lion share are devoted to nanomaterials and nanofabrication processes for the semiconductor industry.  Biomedical applications are also a hot topic for the application of nanotechnology.   Another strong area of interest is the development of carbon nanotubes for a variety of applications. 

Here presented is a brief synopsis of those102  patents.  The brief includes the patent number, the company (in bold) that earned the patent, the patent title followed by a brief note of the nanotechnology involved.  The links will take you to the complete patent. The nanotechnnology involved is noted in bold italics.  Some of these patents have been reported on in depth at this site.

These patent briefs give an indication of the breadth and intensity of nanotechnology research and development.  All patents in this list were granted on the 5th of January, 2010.


7,640,659     Panasonic Corporation (Osaka, JP) Method for forming conductive pattern and wiring board  a conductive paste including metal nano-particles


7,640,766     S.I.P. Technologies L.L.C. (New Orleans, LA) Method and apparatus for disinfecting a refrigerated water cooler reservoir use of hydrophilic, polar or nanoparticle veneers applied over diffuser surfaces

7,640,789     Korea Institute of Science and Technology (KIST, Seoul, KR) Ultra-sensitive metal oxide gas sensor and fabrication method   examples of the metal oxide nanofiber sensor include ZnO, SnO2, TiO2, CaCu3Ti4O12.


7,640,901     Nissan Motor Co., Ltd. (Yokohama, JP) Intake control apparatus for an engine and method  includes a heat conduction structure which may be made of a carbon nano-tube material.

7,640,936     Philip Morris USA Inc. (Richmond, VA) Preparation of mixed metal oxide catalysts from nanoscale particles The mixed nanoscale metal oxide catalysts, which are capable of reducing the concentration of carbon monoxide in the mainstream smoke of a cigarette during smoking, are incorporated into a smoking article component such as tobacco cut filler, cigarette paper and/or cigarette filter material.

7,641,055     Donaldson Company, Inc. (Minneapolis, MN)  Polysulfone and poly(N-vinyl lactam) polymer alloy and fiber and filter materials made of the alloy  Nano polymer alloys that are superior fillers in plastics, rubber compounds and tires compared to carbon black.

7,641,242     CorSolutions, LLC (Groton (Lansing), NY) Compression connection  an integrated nanofluidic separation chromatography system and electrospray device

7,641,468     Hewlett-Packard Development Company, L.P. (Houston, TX) Imprint lithography apparatus and method employing an effective pressure  Nanoimprint lithography advances and materials for semiconductor fabrication.


7,641,613     Angelsen; Bjorn A. J. (Trondheim, NO), Hansen; Rune (Stadsbygd, NO) Ultrasonic contrast agent detection and imaging by low frequency manipulation of high frequency scattering properties Nano lipid fluids are involved.

7,641,645     Angio Dynamics, Inc. (Queensbury, NY) Combination thrombolytic infusion catheter and dilator system  conceptual devices such as nano-technology sized microsurgical robots, and fiber optics for lasers, may be guided over wires and into grafts or other ports to the body.

7,641,680     Advanced Bio Prosthetic Surfaces, Ltd. (Dallas, TX) Endoluminal implantable stent-grafts  Nano-fabrication and vacuum coating arts are involved in manufacturing process.

7,641,780     Advanced Bio Prosthetic Surfaces, Ltd. (Dallas, TX) Two-dimensional microfluidics for protein separations and gene analysis microelectronic fabrication, nano-fabrication and vacuum coating techniques used in production

7,641,798     Sharp Kabushiki Kaisha (Osaka, JP) Waste water treatment method and waste water treatment apparatus  Waste water treated with  micro-nano bubbles generation technology.

7,641,802     Sharp Kabushiki Kaisha (Osaka, JP) Wastewater treatment method and wastewater treatment equipment  Waste water treated with  micro-nano bubbles generation technology.

7,641,815     Ultradots, Inc. (Menlo Park, CA) Luminescent materials that emit light in the visible range or the near infrared range Quantum dot materials in anti-counterfeiting, inventory, photovoltaic, and other applications.

7,641,820     Industrial Technology Research Institute (Hsinchu, TW) Nano compounds and organic memory devices comprising the same Nano compound includes a metal or oxide

7,641,823     MAP Pharmaceuticals, Inc. (Mountain View, CA) Synthesis of small particles can produce particles down to nanometer size, although such particles can be more difficult to collect and naturally aggregate into larger particles.

7,641,829     Florida State University Research Foundation (Tallahassee, FL) Method for mechanically chopping carbon nanotube and nanoscale fibrous materials  Novel machine to cut carbon nanotubes for electronic and polymer compounding.

7,641,840     Molecular Imprints, Inc. (Austin, TX) Method for expelling gas positioned between a substrate and a mold   Nanoimprint lithography is capable of sub-32 nanometer semiconductor device features, a next generation nanofabrication process

7,641,860     NanoTek, LLC (Louisville, TN) Modular and reconfigurable multi-stage microreactor cartridge apparatus Lab-on-a-chip" technology has used microfluidics to perform chemical reactions and analyses at very high speeds while consuming small nano amounts of starting materials.

7,641,863     UT-Battelle LLC (Oak Ridge, TN) Nanoengineered membranes for controlled transport Nanoengineered membranes acts as nanosieves and enable  micro chemical factories

7,641,869     Yeda Research and Development Company Ltd. (Rehovot, IL) Method and apparatus for producing inorganic fullerene-like nanoparticles Nanofabrication gas phase process results in substantially pure phase of the inorganic fullerene-like nanoparticles.

7,641,880     Ohio University (Athens, OH) Room temperature synthesis of GaN nanopowder  most practical yet reported for synthesis of nanocrystalline GaN. It should permit easy scale-up and may eventually be adapted for production of colloidal GaN quantum dots.

7,641,882     Massachusetts Institute of Technology (Cambridge, MA) Fullerenic structures and such structures tethered to carbon materials  Nanofabrication method for Dichloromethano [60]fullerene and method for tethering fullerenes to a carbon nanotube  material including the steps of adding functionalized fullerene to a liquid suspension containing a carbon material.

7,641,883     Samsung Electronics Co., Ltd. (KR) Method for separating carbon nanotubes, method for dispersing carbon nanotubes and compositions used for the methods Nanofabrication process to separate carbon nanotubes for use nanoscale electronic devices.

7,641,884     Samsung Electronics Co., Ltd. (KR) Method for fabricating carbon nanotubes and carbon nano particles  Carbon nanotubes can easily separate from each other without the problem of non-uniformity, because the carbon micro carrier used is in a microscale size.

7,641,885     Beijing FUNATE Innovation Technology Co., Ltd. (Beijing, CN) and Hon Hai Precision Industry Co., Ltd. (Tu-Cheng, Taipei Hsien, TW) Method for making a carbon nanotube film Nanofabrication processes to grow carbon nanotubes and then use them in nanoscale semiconductor devices.

7,641,886     Yeda Research & Development Company Ltd. (Rehovot, IL) and  A.Y.Y.T. - Technological Application and Data Update Ltd. (Rehovot, IL) Process and apparatus for producing inorganic fullerene-like nanoparticles  Nanofabrication process for formation of fullerene-like metal chalcogenide nanoparticles products.

7,641,887     Institut Francias du Petrole (Rueil Malmaison Cedex, FR) Alumina-on-alumina composite supports Nano alumina catalyst for petroleum refinery applications.

7,641,938     Tsinghua University (Beijing, CN) Hon Hai Precision Industry Co., Ltd. (Tu-Cheng, Taipei Hsien, TW) Method for manufacturing carbon nanotube composite material  Carbon nanotube composite material may be used in heat sinks.

7,641,945     Mitsubishi Denki Kabushiki Kaisha (Tokyo, JP)
Ishikawajima-Harima Heavy Industries Co. (Tokyo, JP) Electrical-discharge surface-treatment method  A method of metal injection molding (MIM), a method of molding powder by thermal spraying or carrying nano-powder on a jet stream, and the like.

7,641,971     Crane Company (Stamford, CT) Metal-treated particles for remediation Iron nanoparticles for chemical and radioactive waste water Treatment.

7,641,977     Mrinal Thakur (Auburn, AL) Applications of nonconjugated conductive polymers  The enhancement of the nonlinear optical effect is due to the special charge-transfer complex structure and formation of nano-optical domains.

7,641,992     Medtronic, Inc. (Minneapolis, MN) Medical device having lithium-ion battery  Lithium metal nanoparticle composites for batteries.

7,641,997     UT-Battelle LLC (Oak Ridge, TN) Design and synthesis of guest-host nanostructures to enhance ionic conductivity across nanocomposite membranes  An ion conducting membrane has a matrix including an ordered array of hollow channels and a nanocrystalline electrolyte contained within at least some or all of the channels. The matrix is silica, and the electrolyte is yttrium doped zirconia.

7,642,013     Medtronic, Inc. (Minneapolis, MN) Medical device having lithium-ion battery  lithium metal nanoparticle composites.

7,642,035     Industrial Technology Research Institute (Hsinchu, TW) Sensitized photochemical switching for cholesteric liquid crystal displays  Indium Tin Oxide (ITO) conductor of 100 nanometers or less, nano-pigments for display applications.

7,642,059     Roche Diagnostics Operations, Inc. (Indianapolis, IN) Single receptor assays for immunosuppressive drugs  Nanoshells, polystyrene latex microparticles to encapsulate drugs.

7,642,077     Genencor International, Inc. (Palo Alto, CA) Biocomposite comprising co-precipitate of enzyme, silicate and polyamine  nanocomposite.

7,642,108     Philips Lumileds Lighting Company, LLC (San Jose, CA) LED including photonic crystal structure  photonic crystal light emitting diode ("PXLED") formed from nano GaN have a low surface recombination velocity and hence a high efficiency.

7,642,110     Qualcomm MEMS Technologies, Inc. (San Diego, CA) Method for fabricating a structure for a microelectromechanical systems (MEMS) device  A microfabrication process to manufacture  nanometer scale elements for MEMS devices using photolithography and electron beam etch.

7,642,114     Semiconductor Energy Laboratory Co., Ltd. (Atsugi-shi, Kanagawa-ken, JP) Micro electro mechanical device and manufacturing method thereof  Nano indentation measurement

7,642,124     OrganicID, Inc. (Colorado Springs, CO) Structure and fabrication of self-aligned high-performance organic FETs Nanofabrication process using nano-particle silver ink, nano-particle gold ink,

7,642,177     Samsung Electronics Co., Ltd. (Gyeonggi-do, KR) Method of manufacturing nanowire Silicon (Si) nanowire, a germanium (Ge) nanowire and a silicon germanium (SiGe) nanowire.

7,642,180     Applied Materials, Inc. (Santa Clara, CA) Semiconductor on insulator vertical transistor fabrication and doping process Nanofabrication process using nanomaterials to make semiconductor devices.

7,642,199     Xerocoat Inc. (Redwood City, CA) Silica and silica-like films and method of production  The precursor formulation is then cured in an ammoniacal atmosphere to produce a continuous, interconnected, nano-porous silica network.

7,642,201     Tokyo Electron Limited (Tokyo, JP) Sequential tantalum-nitride deposition An iPVD system is programmed to deposit uniform material, such as barrier material, into high aspect ratio nano-size features on semiconductor substrates using a multi-step process within a vacuum chamber

7,642,205     Mattson Technology, Inc. (Fremont, CA) Rapid thermal processing using energy transfer layers to produce microcrystalline or even nanocrystalline materials for IT applications

7,642,208     Kimberly-Clark Worldwide, Inc. (Neenah, WI) Abrasion resistant material for use in various media  ferroelectric material has a longest dimension in a range of from about 10 nanometers to about 10 micrometers

7,642,215     John Lombardi  (Tucson, AZ) Chemically-resistant shelter coatings Clay filled PVOH nanocomposite coated GP Fabric

7,642,217     Samsung SDI Co., Ltd. (Suwon-si, KR) Pt/Ru alloy catalyst for fuel cell Nano platinum and ruthenium catalyst to improve methanol fuel cell operation.

7,642,222     Los Alamos National Security, LLC (Los Alamos, NM) Method for improving performance of high temperature superconductors within a magnetic field  Metallic nanodots improve superconductors.

7,642,228     Genentech, Inc. (South San Francisco, CA) Method for making heteromultimeric polypeptides  Microemulsions, nano-particles and nanocapsules to encapsulate drugs.

7,642,239     Center for Molecular Medicine and Immunology (Belleville, NJ) and Immunomedics, Inc. (Morris Plains, NJ) Inhibition of placenta growth factor (PLGF) mediated metastasis and/or angiogenesis  Methods to generate nano or micro-scale particles out of a variety of pharmaceutical agents, including proteins and peptides

7,642,242     Genentech, Inc. (South San Francisco, CA) PRO34128 polypeptides  Colloidal drug delivery systems (for example, liposomes, albumin microspheres, microemulsions, nano-particles, and nanocapsules) or in macroemulsions.

7,642,295     Canon Kabushiki Kaisha (Tokyo, JP) Electrolyte membrane of siloxane-based polymer and solid polymer fuel cell utilizing the same Carbon black, carbon fibers, graphite and carbon nanotube conductive fillers for fuel cell.

7,642,308     PolyOne Corporation (Avon Lake, OH) Nanonylon composites prepared by chain extension reactive extrusion  Nanofabrication process for nanonylon composites.

7,642,309     Behr Process Corporation (Santa Ana, CA) Exterior paint formulation with nanoparticles, results in one coat, no primer coating that resists environmental decay.  

7,642,310     Sony Corporation (Tokyo, JP) Polyester molding for use with a casing Examples of the inorganic fillers include, in addition to carbon and silicon dioxide, for instance,nano particles of metal oxides such as alumina, silica, magnesia and ferrite, silicates such as talc, micas, kaolin, zeolite and the like, nano particles of barium sulfate, calcium carbonate, fullerene and the like

7,642,315     SABIC Innovative Plastics IP B.V. (Bergen op Zoom, NL) Polycarbonate-poly(alkylene oxide) copolymer compositions and articles formed therefrom  Polymer compounds with nano-size inorganic materials such as titanium oxide, cerium oxide, and zinc oxide, all with a particle size less than or equal to about 100 nanometers

7,642,319     Acushnet Company (Fairhaven, MA) Highly-neutralized acid polymers and their use in golf balls Sports application of nanofillers in golf balls.

7,642,344     Operon Biotechnologies, Inc. (Huntsville, AL) Methods and compositions for determining the sequence of nucleic acid molecules nano-spray mass spectrometry

7,642,350     Pfizer Limited (Sandwich, Kent, GB) Purine derivatives  Formulations suitable for oral administration include solid, semi-solid and liquid systems such as tablets; soft or hard capsules containing multi- or nano-particulates, liquids, or powders; lozenges (including liquid-filled); chews; gels; fast dispersing dosage forms; films; ovules; sprays; and buccal/mucoadhesive patches.

7,642,463     Honeywell International Inc. (Morristown, NJ) Transparent conductors and methods for fabricating transparent conductors  Transparent conductors with nanowires having silver oxide complexes

7,642,489     Tsinghua University (Beijing, CN) and Hon Hai Precision Industry Co., Ltd. (Tu-Cheng, Taipei Hsien, TW) Flexible electrothermal composite and heating apparatus having the same Flexible electrothermal composite with carbon nanotubes.

7,642,498     Aptina Imaging Corporation (George Town, KY) Capacitor multipler circuits and the applications thereof to attenuate row-wise temporal noise in image sensors Nanometer scale devices for image sensors.

7,642,510     E.I. du Pont de Nemours and Company (Wilmington, DE) Ion source for a mass spectrometer Metrology at the nanoscale, nano-electrospray

7,642,512     Osaka University (Suita-Shi, JP) Mass spectrometry and mass spectroscope,   Metrology at the nanoscale.

7,642,527     Phoseon Technology, Inc. (Hillsboro, OR) Multi-attribute light effects for use in curing and other applications involving photoreactions and processing Lithographic applications (e.g., resists, dielectrics, micro imprint, and nano imprint)

7,642,531     TEL Epion Inc. (Billerica, MA) Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipment gas clusters are considered nano-sized aggregates of materials that are gaseous under conditions of standard temperature and pressure

7,642,533     Cymer, Inc. (San Diego, CA) Extreme ultraviolet light source. Light source for next generation nanolithography.

7,642,539     Macronix International Co., Ltd. (Hsinchu, TW) Thin film fuse phase change cell with thermal isolation pad and manufacturing method Nanofabrication process for formation of the bridge, for use in a memory cell in the PCRAM, can be used to make a very small bridge for other uses. Nano-technology devices with very small bridge structures are provided.

7,642,541     Sony Corporation (Tokyo, JP) and Sony Deutschland GmbH (Berlin, DE) Functional device and method of manufacturing it. Nanoscale devices for use in all things generating a digital display.

7,642,546     Zettacore, Inc. (Englewood, CO) and North Carolina State University (Raleigh, NC) Molecular memory devices including solid-state dielectric layers and related methods Hybrid molecular-silicon technology may be important not only in utilizing the advantages of the individual charge-storage molecules, such as discrete energy states, low voltage operation, nano-scale size etc., but also in extending the impact of silicon-based technology.

7,642,552     Samsung Electro-Mechanics Co., Ltd. (Suwon-Si, Gyeonggi-Do, KR) Liquid crystal display device and manufacturing method therefor The adhesion strength is measured by a nano scratch method.

7,642,561     Samsung Electro-Mechanics Co., Ltd. (Suwon-Si, Gyeonggi-Do, KR) Semiconductor light emitting diode having efficiency and method of manufacturing the same
semiconductor layer is formed on a nano pattern

7,642,578     Samsung Electronics Co., Ltd. (KR) Semiconductor device having a round-shaped nano-wire transistor channel and method of manufacturing same FET having one or more nano-wire channels and a method of manufacturing the FET, which substantially overcome one or more of the drawbacks due to the limitations and disadvantages of the prior art.

7,642,582     International Business Machines Corporation (Armonk, NY) Imagers having electrically active optical elements Nanomaterials include Carbon Nanotube, Indium Oxide, Indium tin oxide, conductive oxides or nitrides, organic conductive polymers.

7,642,585     Macronix International Co., Ltd. (Hsinchu, TW) Non-volatile memory cells, memory arrays including the same and methods of operating cells and arrays High Speed and Nonvolatile Si Nanocrystal Memory for Scaled Flash Technology

7,642,603     Intel Corporation (Santa Clara, CA) Semiconductor device with reduced fringe capacitance Nanomaterials include germanium (Ge), a silicon germanium alloy (SixGey), gallium arsenide (GaAs), InSb, GaP, GaSb, as well as carbon nanotubes

7,642,649     Texas Instruments Incorporated (Dallas, TX) Support structure for low-k dielectrics Nano inter-level dielectric (ILD) layers

7,642,650     Fujitsu Microelectronics Limited (Tokyo, JP) Semiconductor device having a pillar structure Semiconductor devices formed using nanomaterials and metals such as Cu Al, or Ni, a nitride such as TaN, diamond, fullerene, carbon nanotube

7,642,692     The United States of America as represented by the Secretary of the Army (Washington, DC) PZT MEMS resonant Lorentz force magnetometer    (MEMS devices)

7,642,702     Canon Kabushiki Kaisha (Tokyo, JP) Electron source, image display apparatus, image reproducing apparatus, wiring board, and electronic device a field emission type electron-emitting device using a carbon fiber such as a carbon nano-tube and a metal-insulator-metal type electron-emitting device

7,642,705     Samsung SDI Co., Ltd. (Suwon-si, KR) Electron emission device and method of manufacturing the same Electron emission materials include carbon nanotube based material, graphite nanofiber, silicon nanowire

7,642,719     General Electric Company (Schenectady, NY) Energy efficient fluorescent lamp having an improved starting assembly and preferred method for manufacturing  conductive path made from a metal conductor or nanofiber

7,642,777     University of Virginia Patent Foundation (Charlottesville, VA) Fast automatic linear off-resonance correction method for spiral imaging  Biomedical imaging: macro to nano


7,643,100     NEC Corporation (Tokyo, JP) Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part A chemical microchip used in a nanotechnology chemical analysis system, such as (Micro Total Analysis Systems) LOC (Laboratory On Chip)

7,643,192     ASML Holding N.V. (Veldhoven, NL) (San Diego, CA)  Pattern generator using a dual phase step element and method of using same Used in nanolithography to create next generation semiconductors.

7,643,199     Qualcomm MEMS Technologies, Inc High aperture-ratio top-reflective AM-iMod displays An interferometric modulator, MEMS devices for displays.

7,643,202     Qualcomm MEMS Technologies, Inc. (San Diego, CA) Microelectromechanical system having a dielectric movable membrane and a mirror  MEMS devices for displays


7,643,349     Macronix International Co., Ltd. (Hsinchu, TW) Efficient erase algorithm for SONOS-type NAND flash Non-Volatile Memory with Extremely High Density Metal Nano-Dots

7,643,609     Haile Selassie Clay and Andrea Clay; (Oakland, CA) Secondary X-ray imaging technique for diagnosing a health condition  may be applied to scanning of human patients, animals, food or other biological monitoring, nanotechnological diagnosis, security coatings, photolithography, ion-implantation and other practical uses where  precise 3-D determinations of biochemical or material compositions of materials is desired.

7,643,714     California Institute of Technology (Pasadena, CA) Nanophotonic devices in silicon . Novel tool kit to produce nanophotonic devices for a wide range of photonic and optical applications.l

7,644,387     SII Nano Technology Inc. (Chiba, JP) Semiconductor mask correcting device and semiconductor mask correcting method  Nanofabrication process improvement using novel mask corrections for nanometer device manufacturing by photolithography.

7,644,388     PDF Solutions, Inc. (San Jose, CA) Method for reducing layout printability effects on semiconductor device performance  Nanofabrication for  producing nanometer scale devices.

7,644,389     Qimonda AG (Munich, DE) Method for producing a mask for the lithographic projection of a pattern onto a substrate Nanofabrication process involving multiple mask by defunct company.

7,644,447     Park Systems Corp. (Seoul, KR) Scanning probe microscope capable of measuring samples having overhang structure  Metrology, measurements at the nanoscale.

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